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Information and Telecommunication Technology Center (ITTC)

BibTeX


@InProceedings{ Lee98Smooth,
author= "Y.S. Lee and X.D. Hua and K.J. Nordheden",
title= "\{Smooth and Anisotropic RIE of GaAs Slot Via Holes for HEMTs Using CI2/BCI3/Ar Plasmas}",
booktitle= "\{194th Meeting of the Electrochemical Society}",
month= "Nov.",
volume= "98",
number= "2",
year= "1998"
}