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@Article{ Nordheden99Smooth,
author= "K.J. Nordheden and X.D. Hua and Y.S. Lee and L.W. Wang and D.C. Streit and H.C. Yen",
title= "\{Smooth and Anisotropic Reactive Ion Etching of GaAs Slot Vias for Monolithic Microwave Integrated Circuits Using CI2/BCI3/Ar Plasmas}",
journal= "\{Journal of Vacuum Science Technology}",
volume= "17",
number= "1",
pages= "158",
year= "1999"